Piezoresistive silicon micro-acceleration sensor design simulation. Pdf
Using ANSYS software structure of the three forms of silicon micro-acceleration sensor the middle of the finite element simulation, through comparative analysis, which elected the optimum performance in the form of the structure.
TIPS:The description of file is automatically translated by machine, we do not guarantee the accuracy of machine translation,so we are not responsible for the problem arising from the direct or indirect use of data, either incorrct tanslation or misuse.The original version is:Chinese (Simplified) 。
All languages:English Chinese (Simplified) Chinese (Traditional)
Disclaimer:isheu.com aims to provide an online platform for sharing data, not to infringe the intellectual property rights; if you found the file uploaded by users infringe intellectual property rights, please notify us via Email, we will deal with in a timely manner.
All languages:English Chinese (Simplified) Chinese (Traditional)
Disclaimer:isheu.com aims to provide an online platform for sharing data, not to infringe the intellectual property rights; if you found the file uploaded by users infringe intellectual property rights, please notify us via Email, we will deal with in a timely manner.
